Endpoint Detection Using Both By-product and Etchant Gas in Plasma Etching Process
نویسندگان
چکیده
منابع مشابه
Multivariate Endpoint Detection of Plasma Etching Processes
In plasma etching processes it is critical to know when the film being etched has cleared to the underlying film, i.e. to detect endpoint, in order to achieve the desired device performance in the resulting integrated circuit. The most highly utilized sensor technology for determining endpoint has historically been optical emission spectroscopy (OES), because it is both non-invasive and highly ...
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We investigate two statistical-detection problems, change-point detection and pattern matching in plasma etch endpoint detection. Our approach is based on a segmental semi-Markov model framework. In the change-point detection problem, the changepoint corresponds to state switching in the model. For pattern matching, the pattern is approximated as a sequence of linear segments which are then mod...
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To investigate the electrical changes observed at plasma etching endpoints, experiments were performed in an inductively coupled, rf-biased reactor, during CF4/Ar plasma etches of silicon dioxide films on silicon substrates. The rf bias current, voltage, and impedance were measured vs. time during etching. Simultaneously, a Langmuir probe measured the electron and ion densities, ion current den...
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Endpoint detection is very important undertaking on the side of getting a good understanding and figuring out if a plasma etching process is done in the right way, especially if the etched area is very small (0.1%). It truly is a crucial part of supplying repeatable effects in every single wafer. When the film being etched has been completely cleared, the endpoint is reached. To ensure the desi...
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hydrochlorothiazide (hct) is a diuretic agent which is shown to be effective in the treatment of hypertension. literature reports have demonstrated that urinary excretion data may be used to assess the bioavailability of various formulations containing this thiazide. also hct consumption by the athletes is one of the drugs which should be regulated by world anti-doping agency (wada), because of...
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ژورنال
عنوان ژورنال: Journal of IKEEE
سال: 2015
ISSN: 1226-7244
DOI: 10.7471/ikeee.2015.19.4.541